JP6750294B2 - Pulse wave detection device and biological information measurement device - Google Patents

Description

The present invention relates to a pressure pulse wave sensor, a pulse wave detection device, and a biological information measurement device.

A biological information measuring device capable of measuring biological information such as pulse or blood pressure using information detected by the pressure sensor in a state where the pressure sensor is in direct contact with a living body part through which an artery such as a radial artery of the wrist passes. Is known (for example, refer to Patent Document 1).

The pressure sensor mounted on the biological information measuring device described in Patent Document 1 accommodates a circuit board, a spacer provided on the circuit board, a sensor chip provided on the spacer, and the circuit board. And a protection plate for protecting the circuit board. An opening is provided in this protection plate, and the sensor chip is configured to project from this opening.

JP-A-4-67839

In the sensor unit described in Patent Document 1, the sensor chip projects from the opening of the protection plate. For this reason, the surface of the sensor chip is dominant in the portion of the pressure sensor that comes into contact with the wrist, and the force applied to the surface of the sensor chip becomes large. Therefore, when it is assumed that the biological information measuring device is attached for a long time such as one day, improvement of durability of the sensor chip becomes a problem.

The present invention has been made in view of the above circumstances, and a pressure pulse wave sensor and a pulse wave detection device capable of sufficiently ensuring durability when wearing for a long time and suppressing manufacturing cost. And to provide a biological information measuring device.

The pulse wave detection device of the present invention, a sensor section having a sensor chip having an element row composed of a plurality of pressure detection elements arranged in one direction intersecting the radial artery, and a substrate to which the sensor chip is fixed , a sensor unit, A protective member for protecting the sensor portion , and a filling material filled between a detection surface of the sensor chip on which the pressure detection element is formed and an opening provided in the protective member, and The pressure pulse wave sensor, wherein the opening is arranged at a position opposite to the side of the sensor chip fixed to the substrate and facing the detection surface in a vertical direction perpendicular to the detection surface, A rotation mechanism that rotates the pressure pulse wave sensor around the direction orthogonal to the one direction and the vertical direction , and the outer peripheral surface of the protection member has a top surface on which the opening is formed, and the top surface. A sloped surface that is continuous with both end edges in the one direction and that is sloped with respect to the opening surface of the opening, and the tilt angle of the tilted surface depends on the rotation mechanism. The rotation angle of the sensor is less than the maximum value.

The biological information measuring device of the present invention includes the pulse wave detecting device and a biological information calculating unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

Advantageous Effects of Invention According to the present invention, it is possible to provide a pressure pulse wave sensor capable of sufficiently ensuring durability when wearing for a long time and suppressing manufacturing costs, and a biological information measuring device including the pressure pulse wave sensor. ..

It is a schematic diagram which shows schematic structure of the biological information measuring device 100 which is one Embodiment of this invention. FIG. 2 is an exploded perspective view showing an external configuration of a pressure pulse wave sensor 10 shown in FIG. 1. It is a perspective view which shows the external appearance structure of the pressure pulse wave sensor 10 shown in FIG. It is a schematic diagram which shows the external structure of the sensor part 20 shown in FIG. It is a cross-sectional schematic diagram of the VV line shown in FIG. 4 is a plan view of the pressure pulse wave sensor 10 shown in FIG. 3 viewed from a direction Z. FIG. FIG. 7 is a perspective view showing an external configuration of a protective cover 401 that is a modified example of the protective cover 40 of the pressure pulse wave sensor 10 shown in FIG. 2. FIG. 9 is a schematic cross-sectional view of a pressure pulse wave sensor 12 which is a modified example of the pressure pulse wave sensor 10 shown in FIG. 2. FIG. 9 is a perspective view showing an external configuration of a sensor unit 201 which is a modified example of the sensor unit 20 of the pressure pulse wave sensor 10 shown in FIG. 2. It is a cross-sectional schematic diagram of the modification of the pressure pulse wave sensor 10 shown in FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic diagram showing a schematic configuration of a biological information measuring device 100 which is an embodiment of the present invention.

The biological information measuring device 100 includes a housing 80, an air bag 70 supported by the housing 80, a rotation drive unit 60 fixed to the air bag 70, and a pressure rotatably supported by the rotation drive unit 60. The pulse wave sensor 10 is provided. The biological information measuring device 100 is used by being worn on the wrist of the person to be measured with a band (not shown).

The air bag 70 constitutes a pressing member that presses the rotation drive unit 60 and the pressure pulse wave sensor 10 against the body surface of the wrist. The inner pressure of the air bladder 70 is adjusted by a pump (not shown) built in the housing 80. The pump is controlled by a control unit built in the housing 80.

The rotation drive unit 60 includes a rotation mechanism 61 for rotating the pressure pulse wave sensor 10 around axes extending in two directions orthogonal to each other along a detection surface of the pressure pulse wave sensor 10 described later, and a rotation mechanism 61. And an actuator 62 for driving the. The actuator 62 is controlled by the control unit built in the housing 80.

The pressure pulse wave sensor 10 generates a pressure pulse wave which is a pressure vibration wave transmitted from the radial artery T passing through the inside of the wrist to the body surface while being pressed against the body surface by the air bag 70 with a predetermined pressing force. It is a sensor for detecting. In the housing 80, a biological information calculation unit (not shown) that calculates biological information such as a pulse rate, a heart rate, or a blood pressure value based on the pressure pulse wave detected by the pressure pulse wave sensor 10 is built in. There is.

FIG. 2 is an exploded perspective view showing an external configuration of the pressure pulse wave sensor 10 shown in FIG. FIG. 3 is a perspective view showing an external configuration of the pressure pulse wave sensor 10 shown in FIG.

The pressure pulse wave sensor 10 includes two sensor portions 20 each having a longitudinal shape along a direction X, which is one direction, and a flexible substrate 21 on which the two sensor portions 20 are arranged and fixed in a direction Y orthogonal to the direction X. A base 30 to which the flexible substrate 21 is fixed and a protective cover 40 as a protective member that is fixed to the base 30 to which the flexible substrate 21 is fixed and protects the two sensor units 20 are provided.

The base 30 has a rectangular planar shape when viewed in the direction Z orthogonal to the direction X and the direction Y, and has a mounting surface 32 on which the flexible substrate 21 is mounted. The mounting surface 32 is provided with two base through holes 33 penetrating the mounting surface 32 in the direction Z in correspondence with the number of the sensor units 20. In addition, on the mounting surface 32, at both ends in the direction Y, openings 34 having a size through which the flexible substrate 21 can be inserted are provided. Both ends of the flexible substrate 21 are pulled out to the back side of the base 30 through the openings 34.

The protection cover 40 has a rectangular shape in a plan view when viewed in the direction Z and has a size similar to the outer shape of the base 30, and the mounting surface 32 of the base 30 in the state where the flexible substrate 21 is fixed to the base 30. It is fixed on the surface around.

The protective cover 40 has two openings 42 formed at positions facing the two sensor units 20 while being fixed to the base 30. The outer peripheral surface of the protective cover 40 (the surface exposed to the outside in the state shown in FIG. 3) has a flat top surface 41, an inclined surface 44 continuous with the edge 45 of the top surface 41, and an edge of the inclined surface 44. A vertical surface 46 perpendicular to the continuous top surface 41. The detailed shape of the protective cover 40 will be described later.

FIG. 4 is a schematic diagram showing an external configuration of the sensor unit 20 shown in FIG. FIG. 5 is a schematic cross-sectional view taken along the line VV shown in FIG.

The sensor unit 20 includes a sensor chip 22 and a container-shaped substrate 50 having a recess 51 and having the bottom surface 52 of the recess 51 fixed to the sensor chip 22.

The sensor chip 22 includes a semiconductor substrate 23 such as a silicon single crystal or a single crystal of a compound semiconductor such as gallium-arsenic. The semiconductor substrate 23 has a rectangular shape whose direction is the longitudinal direction. On the surface of the semiconductor substrate 23, an element array 25 including a plurality of pressure detection elements 24 arranged along the direction X is formed. The pressure detection element 24 is an element that detects strain applied to the element as a pressure signal, and for example, a strain gauge resistance type, a semiconductor piezoresistance type, or an electrostatic capacitance type element is used. The surface of the semiconductor substrate 23 is a flat surface, and this flat surface constitutes a detection surface 26 for detecting pressure. The direction perpendicular to the detection surface 26 is the direction Z.

Chip-side terminal portions 27, which are electrode pads electrically connected to the respective pressure detection elements 24, are formed at both ends of the surface of the semiconductor substrate 23 in the direction X (see FIG. 4 ).

The substrate 50 is formed of a hard substrate having a sufficiently higher rigidity than the semiconductor substrate 23 such as a ceramic substrate or a glass substrate. The substrate 50 has a rectangular shape whose direction X is the longitudinal direction.

As shown in FIG. 5, a recessed portion that is recessed in the direction Z perpendicular to the detection surface 26 is formed on the surface opposite to the detection surface 26 of the semiconductor substrate 23. The semiconductor substrate 23 is configured to have a thin portion (diaphragm) whose thickness in the direction Z is thinner than other portions due to the recess.

A portion of the surface of the semiconductor substrate 23 opposite to the detection surface 26 except the concave portion is fixed to the bottom surface 52 of the concave portion 51 of the substrate 50 with an adhesive 29. As the adhesive material 29, for example, an ultraviolet curable resin is used.

The semiconductor substrate 23 is fixed to the bottom surface of the recess 51 of the substrate 50 so that the recess of the semiconductor substrate 23 communicates with the atmosphere only through the through hole 54 formed in the bottom surface 52 of the recess 51 of the substrate 50.

As shown in FIG. 5, a through hole 211 is formed in the flexible substrate 21 at a position facing the through hole 54 of the substrate 50. The through hole 211 communicates with the base through hole 33 of the base 30. As a result, the base through hole 33, the through hole 211, and the through hole 54 keep the inside of the recess of the semiconductor substrate 23 at atmospheric pressure.

As shown in FIG. 4, a substrate including electrode pads for electrically connecting to the electrode pads of the chip-side terminal portion 27 on the surface of the substrate 50 in which the recess 51 is formed, in both ends in the direction X. The side terminal portion 53 is provided.

As shown in FIG. 5, the electrode pads of the chip-side terminal portion 27 and the electrode pads of the substrate-side terminal portion 53 are connected by a conductive member 28 such as gold or aluminum. The periphery of the conductive member 28 is covered and protected by a protection member 281 made of an insulating material such as resin. The space between the side surface of the recess 51 of the substrate 50 and the semiconductor substrate 23 and the adhesive material 29 is filled with a material 282 whose volume change less than that of the protective member 281 due to temperature and humidity.

Next, details of the protective cover 40 will be described.

The top surface 41 of the protective cover 40 is opposite to the side where the sensor chip 22 and the substrate 50 are fixed (the place where the adhesive 29 is located) side of the pressure detection element 24 in the direction Z perpendicular to the detection surface 26 of the sensor chip 22. It is a surface arranged on the side and parallel to the detection surface 26. The two surfaces being parallel means a state in which the angle formed by the two surfaces is within a range including a tolerance centered on 0 degree. Similarly, the two surfaces being vertical means that the angle formed by the two surfaces is within a range including a tolerance centering on 90 degrees.

The protective cover 40 is provided with an opening 42 that penetrates from the position of the top surface 41 facing the detection surface 26 of each sensor chip 22 toward the detection surface 26 side. When viewed in a plan view in the direction Z, the entire element row 25 overlaps the opening 42.

A space surrounded by the inner peripheral surface of the protective cover 40, the base 30, the sensor unit 20, and the flexible substrate 21 is filled with a filler 55 as shown in FIG.

The filling material 55 is also filled in the opening 42 of the protective cover 40, and the surface 551 exposed to the outside of the filling material 55 is formed on the same surface as the top surface 41 of the protective cover 40. The surface 551 constitutes an opening surface of the opening 42. The plane formed by the surface 551 of the filling material 55 and the top surface 41 of the protective cover 40 is parallel to the detection surface 26 and forms a contact surface that comes into contact with the body surface of the measurement subject.

The filler 55 is preferably made of a material having a hardness lower than that of the protective cover 40. For example, a ceramic is preferably used as the material of the protective cover 40, and an epoxy resin or a silicone resin having a hardness lower than that of the ceramic is used as the filler 55.

As shown in FIG. 5, in the cross section of the straight line that overlaps the top surface 41 and extends in the direction X, the inclined surface 44 of the protective cover 40 is continuous with both end edges 45x of the top surface 41 in the direction X, and the surface 551. With respect to the sensor chip 22 in the direction Z, the surface is inclined at an inclination angle θ.

Further, as shown in FIG. 5, the vertical surface 46 of the protective cover 40 is a surface continuous with the inclined surface 44 and perpendicular to the surface 551. The vertical surface 46 is located closer to the sensor chip 22 than the surface 551 in the direction Z, and is located outside the edge 45 of the top surface 41 in a plan view seen in the direction Z.

The shape of the protective cover 40 in a cross section taken along a straight line extending in the direction Y of the pressure pulse wave sensor 10 and passing through the top surface 41 of FIG. 3 is similar to the shape of the protective cover 40 shown in FIG. That is, the outer peripheral surface of the protective cover 40 is a surface that is continuous with the top surface 41 and both edges of the top surface 41 in the direction Y, and is an inclined surface 44 that is inclined with respect to the top surface 41 in the direction toward the sensor chip 22. And a vertical surface 46 continuous with the inclined surface 44.

The side surfaces 31 at both ends of the base 30 in each of the direction X and the direction Y are connected to the vertical surface 46 of the protective cover 40 without a step in the state where the protective cover 40 is fixed, and the vertical surface 46 and the side surface 31 are in the direction. The same plane that is horizontal to Z is formed.

FIG. 6 is a plan view of the pressure pulse wave sensor 10 shown in FIG. 3 viewed from the direction Z. In FIG. 6, only the position of the conductive member 28 of the sensor unit 20 is shown and other components are omitted.

As shown in FIG. 6, the conductive member 28 of the sensor unit 20 is arranged at a position where it does not overlap the edge 45 of the top surface 41 in the plan view seen in the direction Z.

The edge 45 of the top surface 41 is a portion to which the stress is most applied when the top surface 41 is pressed against the body surface. On the other hand, since the conductive member 28 is formed by wire bonding or the like, there is a possibility of disconnection when a large force is applied.

As shown in FIG. 6, since the conductive member 28 is located at a position where it does not overlap the edge 45 of the top surface 41, the conductive member 28 does not exist below the portion where a large amount of stress is applied. Therefore, even when the pressure pulse wave sensor 10 is pressed against the body surface, it is possible to reduce the force applied to the conductive member 28 and prevent disconnection.

Although the conductive member 28 is present inside the end edge 45 in FIG. 6, the same effect can be obtained even if the conductive member 28 is present outside the end edge 45.

The rotation mechanism 61 of the biological information measuring device 100 shown in FIG. 1 is a mechanism for rotating the pressure pulse wave sensor 10 around each of two axes, an axis extending in the direction X and an axis extending in the direction Y.

The biological information measuring device 100 configured as described above is used by being attached to the wrist such that the direction X intersects with the radial artery T of the wrist (see FIG. 1) that is the target of pressure pulse wave detection.

When the biological information measuring device 100 is attached to the wrist and a measurement start instruction is given, the control unit increases the internal pressure of the air bag 70 and presses the pressure pulse wave sensor 10 against the surface of the wrist.

The control unit determines the rotation angle around each of the two axes of the pressure pulse wave sensor 10 extending in the direction X and the axis extending in the direction Y so that the detection accuracy of the pressure pulse wave is maximized.

The control unit rotates the pressure pulse wave sensor 10 at the determined rotation angle, presses the pressure pulse wave sensor 10 against the body surface with a predetermined pressing force, and applies pressure by the pressure detection element 24 of the pressure pulse wave sensor 10. A pulse wave is detected, and biological information is calculated and stored based on the detected pressure pulse wave.

As described above, according to the pressure pulse wave sensor 10, the opening 42 of the protective cover 40 is provided above the detection surface 26 of the sensor chip 22, and the opening 42 is filled with the filling material 55 to protect it. The top surface 41 of the cover 40 and the surface 551 of the filler 55 form a contact surface with the body surface.

As described above, since the contact surface pressed against the body surface is composed of the protective cover 40 and the filler 55, the durability of the sensor chip 22 of the pressure pulse wave sensor 10 can be improved. Therefore, the biological information measuring device 100 can be worn on the wrist and used for a long period of time. By using a material having a hardness higher than that of the filler 55 as the protective cover 40, the durability can be further improved.

Further, according to the pressure pulse wave sensor 10, the surface 551 of the filler 55 can be easily flattened by utilizing the flatness of the top surface 41. Therefore, the manufacturing cost can be reduced. When a material having a hardness higher than that of the filler 55 is used as the protective cover 40, the surface 551 of the filler 55 can be flattened more easily.

Further, the pressure pulse wave sensor 10 is configured such that the protective cover 40 has an inclined surface 44 that is continuous with both end edges 45x of the top surface 41 in the direction X. According to this configuration, when the pressure pulse wave sensor 10 is rotated by the rotation drive unit 60 around the axis extending in the direction Y (around the wrist), the area of the protective cover 40 that contacts the body surface can be reduced.

The biological information measuring device 100 is attached to the wrist so that the top surface 41 of the protective cover 40 is located above the radial artery T, but a hard tissue such as a radius or tendon exists around the radial artery T.

When the pressure pulse wave sensor 10 rotates around the wrist, the inclined surface 44 of the protective cover 40 can release the pressure from these hard tissues, so that the wearing comfort of the biological information measuring device 100 can be improved. .. Further, since the rotation operation of the pressure pulse wave sensor 10 is less likely to be disturbed by the hard tissue, it is possible to maintain a desired rotation angle with a small driving force and pressing force.

The inclined surface 44 of the protective cover 40 may be a curved surface instead of a flat surface. That is, the protective cover 40 may have a curved surface that connects the top surface 41 and the vertical surface 46. The curved surface forms a surface that is continuous with both edges of the top surface 41 in the direction X and that intersects the surface 551 and each of the surfaces perpendicular to the surface 551. As described above, even when the inclined surface 44 is formed of a curved surface, the curved surface of the protective cover 40 can release the pressure from these hard tissues when the pressure pulse wave sensor 10 rotates around the wrist. Therefore, the wearing feeling of the biological information measuring device 100 can be improved.

The inclination angle θ of the inclined surface 44 shown in FIG. 5 is a rotation angle at which the pressure pulse wave sensor 10 can be rotated by the rotation mechanism 61 around an axis extending in the direction Y (pressure pulse wave sensor by the air bag 70). It is preferable to set a value smaller than the maximum value of the rotation angle (when the detection surface 26 is perpendicular to the pressing direction of 10).

By setting such a value, even when the pressure pulse wave sensor 10 is rotated to the maximum around the wrist, the inclined surface 44 is prevented from coming into contact with the body surface, and the rotation operation can be smoothly performed. ..

Further, the pressure pulse wave sensor 10 has a configuration in which the protective cover 40 has a vertical surface 46. In order to obtain the calibration data necessary for converting the strain signal detected by the pressure detection element 24 into a pressure value, the sensor chip 22 has a contact surface composed of the top surface 41 and the surface 551 in the manufacturing process. It is necessary to perform a work of applying a pressure to the contact surface and acquiring a signal from the pressure detection element 24 in a state of being housed in a closed container.

Since the protective cover 40 has the vertical surface 46 closer to the base 30 than the surface 551, a cap-shaped device can be attached around the vertical surface 46 to easily seal the inside of the device. Therefore, the work of generating the calibration data is facilitated, and the manufacturing cost can be reduced.

FIG. 7 is a perspective view showing an external configuration of a protective cover 401 which is a modified example of the protective cover 40 of the pressure pulse wave sensor 10 shown in FIG.

The protective cover 401 has a configuration in which both end surfaces of the protective cover 40 in the direction Y are changed to vertical surfaces 46 which are perpendicular to the surface 551. The vertical surface 46 is a surface that is continuous with the edge of the top surface 41 in the direction Y.

According to the configuration of the protective cover 401, since the edge of the top surface 41 in the direction Y is located away from the sensor chip 22, the stress applied to the sensor chip 22 can be reduced, and the pressure pulse wave detection accuracy can be improved. The durability of the pressure pulse wave sensor 10 can be improved.

The outer peripheral surface of the protective cover 40 of the pressure pulse wave sensor 10 may be configured only by the top surface 41 and the vertical surface 46 that is continuous with the edge 45 of the top surface 41 and is perpendicular to the surface 551. That is, the inclined surface 44 on the outer peripheral surface of the protective cover 40 is not essential.

FIG. 8 is a schematic sectional view of a pressure pulse wave sensor 12 which is a modified example of the pressure pulse wave sensor 10 shown in FIG.

In the pressure pulse wave sensor 12 shown in FIG. 8, the outer peripheral surface of the protective cover 40 is composed of a top surface 41 and a vertical surface 46 continuous with the edge of the top surface 41, and the outer peripheral surface of the protective cover 40 is an inclined surface. The difference from the configuration shown in FIG. Other configurations are the same as those of the pressure pulse wave sensor 10, and the same actions and effects can be obtained. In the configuration shown in FIG. 8, the edge of the top surface 41 and the vertical surface 46 overlap each other when seen in the plan view in the direction Z.

The configurations of the sensor units 20 mounted on the pressure pulse wave sensor 10 and the pressure pulse wave sensor 12 are not limited to those shown in FIGS. 1 and 8. For example, the sensor unit 20 may be changed to the sensor unit 201 shown in FIG.

The sensor unit 201 has the same configuration as the sensor unit 20 except that the substrate 50 is changed to a flat plate-shaped substrate 501. Even when such a sensor unit 201 is used, the effects described above can be obtained.

The embodiments disclosed this time are to be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description but by the claims, and is intended to include meanings equivalent to the claims and all modifications within the scope.

For example, although the pressure pulse wave sensor 10 has two sensor units 20, it may have a configuration having only one sensor unit 20. In this case, the rotation mechanism 61 is changed to a mechanism for rotating the pressure pulse wave sensor 10 only around the axis extending in the direction Y.

When the pressure pulse wave sensor 10 is configured to have only one sensor unit 20, only one pressure detection element 24 may be formed on the surface of the sensor chip 22 of the sensor unit 20. In this case, the rotary drive unit 60 can be omitted.

The pressure pulse wave sensor 10 may have a configuration including three or more sensor units 20 arranged in the direction Y.

Although the top surface 41 of the protective cover 40 is parallel to the detection surface 26, the top surface 41 of the protection cover 40 may be inclined with respect to the detection surface 26 as shown in FIG. .. Also in the modification shown in FIG. 10, the opening 42 formed in the top surface 41 is filled with the filling material 55, and the opening surface of the opening 42 is parallel to the detection surface 26. Even with such a configuration, durability can be improved.

Although the biological information measuring device 100 to be worn on the wrist has been described above, the present invention can be applied to any biological information measuring device of a type to be attached to a living body part through which an artery passes.

As described above, the following items are disclosed in this specification.

The disclosed pressure pulse wave sensor includes a sensor chip having a pressure detection element, a substrate to which the sensor chip is fixed, and a protection member that protects the substrate and the sensor chip, and the protection member is the In the vertical direction, which is a direction perpendicular to the detection surface on which the pressure detection element is formed, of the sensor chip, the pressure detection element faces the detection surface on the side opposite to the side where the sensor chip and the substrate are fixed. It has an opening arranged at a position, and a filling material is filled between the opening and the detection surface.

In the disclosed pressure pulse wave sensor, the protective member is made of a material having a hardness higher than that of the filling material.

In the disclosed pressure pulse wave sensor, the protection member is made of ceramic.

In the disclosed pressure pulse wave sensor, the outer peripheral surface of the protection member has a vertical surface perpendicular to the opening surface of the opening, and the vertical surface is closer to the sensor chip than the opening surface in the vertical direction. And is overlapped with the edge of the top surface of the protective member in which the opening is formed or outside the edge of the top surface when viewed in a plan view in the vertical direction.

The disclosed pressure pulse wave sensor, the sensor chip has an element row consisting of a plurality of the pressure detection elements arranged in one direction, the outer peripheral surface of the protective member, the top surface in which the opening is formed. It has a surface which is continuous with both end edges in the one direction and which intersects with each of the opening surface of the opening and the surface perpendicular to the opening surface.

The disclosed pressure pulse wave sensor is provided on the substrate, a substrate-side terminal portion for electrically connecting to a terminal portion provided on the end portion in the one direction of the sensor chip, and a terminal of the sensor chip. And a conductive member that connects the board-side terminal portion to each other, and the conductive member is arranged at a position that does not overlap an edge of the top surface when viewed in a plan view in the vertical direction. ..

In the disclosed pressure pulse wave sensor, the outer peripheral surface of the protection member is a surface that is continuous with both end edges of the top surface in a direction orthogonal to each of the one direction and the vertical direction, and the opening of the opening portion. It has a vertical surface perpendicular to the surface.

The disclosed pulse wave detection device includes the pressure pulse wave sensor, and a rotation mechanism that rotates the pressure pulse wave sensor around a direction orthogonal to each of the one direction and the vertical direction, and the surface is It is an inclined surface inclined with respect to the opening surface, and the inclination angle of the inclined surface is less than the maximum value of the rotation angle at which the pressure pulse wave sensor can be rotated by the rotation mechanism.

The disclosed biological information measurement device includes the pulse wave detection device and a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

The disclosed biological information measuring device includes the pressure pulse wave sensor and a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

100 Biological information measuring device 10, 12 Pressure pulse wave sensor 60 Rotation drive part 61 Rotation mechanism 62 Actuator 70 Air bag 80 Housing T Radial artery 20 Sensor part 21 Flexible substrate 211 Through hole 22 Sensor chip 23 Semiconductor substrate 24 Pressure detection element 25 Element row 26 Detection surface 27 Chip-side terminal portion 28 Conductive member 281 Protective member 282 Material 29 Adhesive material 30 Base 31 Side surface 32 Mounting surface 33 Base through hole 34 Opening 40, 401 Protective cover 41 Top surface 42 Opening portion 44 Slope 45 , 45x edge 46 vertical surfaces 50, 501 substrate 51 recessed portion 52 bottom surface 53 substrate side terminal portion 54 through hole 55 filler 551 surface (opening surface)
θ Tilt angle X, Y, Z direction

Claims (6)

A sensor unit including a sensor chip having an element row composed of a plurality of pressure detection elements arranged in one direction intersecting with the radial artery, and a substrate to which the sensor chip is fixed ,
A protection member for protecting the sensor section ,
A filling material filled between the detection surface of the sensor chip on which the pressure detection element is formed and the opening provided in the protection member, and
The pressure pulse wave sensor, wherein the opening is arranged at a position opposite to the detection surface in a vertical direction perpendicular to the detection surface on the side opposite to the side of the sensor chip fixed to the substrate,
And a rotation mechanism for rotating around a direction perpendicular to said pressure pulse wave sensor in the one direction and the vertical direction,
The outer peripheral surface of the protective member is
A top surface on which the opening is formed,
A surface that is continuous with both edges in the one direction of the top surface, and an inclined surface that is inclined with respect to the opening surface of the opening,
The pulse wave detection device, wherein the inclination angle of the inclined surface is less than the maximum value of the rotation angle at which the pressure pulse wave sensor can be rotated by the rotation mechanism. The pulse wave detection device according to claim 1, wherein
The pulse wave detecting device, wherein the protective member is made of a material having a hardness higher than that of the filling material. The pulse wave detection device according to claim 2,
The pulse wave detecting device, wherein the protective member is made of ceramic. The pulse wave detection device according to any one of claims 1 to 3,
The outer peripheral surface of the protective member further has a vertical surface perpendicular to the opening surface of the opening,
The vertical surface is located closer to the sensor chip than the opening surface in the vertical direction, and overlaps with an edge of the top surface of the protection member in plan view viewed in the vertical direction, or an end of the top surface. A pulse wave detection device located outside the edge. The pulse wave detection device according to any one of claims 1 to 4,
A substrate-side terminal portion provided on the substrate and electrically connected to a terminal portion provided on the end portion in the one direction of the sensor chip,
Further comprising a conductive member connecting the terminal portion of the sensor chip and the board-side terminal portion,
The pulse wave detection device, wherein the conductive member is arranged at a position that does not overlap with an edge of the top surface when seen in a plan view in the vertical direction. The pulse wave detection device according to claim 1.
A biological information measuring device, comprising: a biological information calculation unit that calculates biological information based on the pressure pulse wave detected by the pressure pulse wave sensor.

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