US20110032507A1 - Scanner system and method for registering surfaces - Google Patents
Scanner system and method for registering surfaces Download PDFInfo
- Publication number
- US20110032507A1 US20110032507A1 US11/610,650 US61065005A US2011032507A1 US 20110032507 A1 US20110032507 A1 US 20110032507A1 US 61065005 A US61065005 A US 61065005A US 2011032507 A1 US2011032507 A1 US 2011032507A1
- Authority
- US
- United States
- Prior art keywords
- radiation
- scanner system
- spectrometer
- scanning
- scanner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 30
- 230000005855 radiation Effects 0.000 claims abstract description 67
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 16
- 238000004458 analytical method Methods 0.000 claims abstract description 11
- 230000003595 spectral effect Effects 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 8
- 238000012876 topography Methods 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 238000010276 construction Methods 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 238000005305 interferometry Methods 0.000 claims 1
- 238000000691 measurement method Methods 0.000 claims 1
- 230000001629 suppression Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 18
- 238000005259 measurement Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 5
- 238000010183 spectrum analysis Methods 0.000 description 5
- 230000009466 transformation Effects 0.000 description 5
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000004567 concrete Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001294 Reinforcing steel Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000001454 recorded image Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000011150 reinforced concrete Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
- G01N21/3151—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
Definitions
- the invention relates to a scanner system for registering surfaces according to the preamble of claim 1 , a method for registering surfaces according to the preamble of claim 15 and a geodetic device and a mobile scanning system.
- Methods which successively scan and record the topography of a structure are frequently used for registering surfaces.
- Such a topography represents a cohesive sequence of points which describe the surface or a corresponding model or a description of the surface.
- a customary approach is scanning by means of a laser scanner which in each case registers the spatial position of a surface point by measuring the distance to the targeted surface point by the laser and linking this measurement to the angle information of the laser emission. From this distance and angle information, the spatial position of the registered point can be determined and the surface continuously surveyed.
- image recording by a camera which also provides further information, for example with regard to the surface texture, in addition to the overall visual view, is also carried out simultaneously with this purely geometrical registration of the surface.
- WO 97/40342 describes a ground-based method which records a topography by scanner systems directed in a fixed position.
- a fixed erection point which serves as a basis of a scanner process carried out by means of motors is chosen.
- the three-dimensional location information of the respective surface point can be derived from the distance to the measured point, the angle position at the time of the measurement and the known location of the scanning device.
- Scanner systems are designed especially for the object of registering topography and scan a surface by movement of the scanner system or by changing the beam path.
- WO 2004/036145 discloses, for example, a geodetic measuring device which emits a laser beam for distance measurement from its position within the registered range. Such measuring devices can also be modified for registering surfaces by scanning or can be operated without modification. Motorized theodolites or total stations represent an example of this.
- Such registration processes of the prior art provide images or topographical data which substantially represent the information about spatial distribution or relative arrangement of surface points.
- additionally recorded images permit the derivation of further information.
- An object of the present invention is to provide a scanner system and a method which permits at least a qualitative analysis of a surface in parallel to the registration of the surface.
- a further object is to check or verify qualitative parameters of the surfaces.
- a further object is the provision of a system which permits a higher functionality than the pure registration of surfaces, for example by permitting a warning function in the case of a qualitative change of registered structures.
- the invention relates to a scanner system and a method for registering a surface and a geodetic measuring device equipped with the system or a mobile scanning system.
- the surface is spectrally probed in parallel with scanning, i.e. is scanned so that conclusions can be drawn about the composition or the state of the probed or registered surface from the spectral components of the radiation received.
- the spectral probing can be effected for the entire surface topography, in particular continuously, or for partial areas.
- a separate spectral emission or a spectral analysis can be effected after or during reception of the radiation.
- the two approaches can be combined.
- radiation can be emitted in two spectral ranges separated from one another or two partly overlapping spectral ranges, synchronously or in an alternating manner.
- the laser radiation source already used for scanning and distance measurement
- the emitted radiation thereof may be on the long-wave but also the short-wave side of the laser conventionally used for the distance measurement, the short-wave option also being capable of permitting, for example, fluorescence measurements.
- multispectral or white light sources can also be used.
- the reception can be effected, for example, with only one receiver if, in the case of alternating emission, this receives the reflection in the different spectral ranges as a function of time.
- simultaneous emission for example, it is possible to use two spectrally selective receivers, from the relative intensities of which conclusions can be drawn about the material giving rise to the reflection.
- a system can be designed for detecting rust on concrete surfaces and can emit two complementary radiations in the red and blue range. Red, rust-containing surface regions will have increased reflection in the red spectral range compared with only moist or dry concrete sections, so that, in contrast to the pure light-dark evaluation, rust can be distinguished from wet areas by this method.
- Such a simple method or scanner system can be used for identifying previously known patterns, as occur, for example, in the monitoring of constructions.
- spectrometers are used for this purpose in order to spectrally resolve or to analyze the radiation received.
- spectrometers in principle all types of spectrometers, such as, for example, prism, grating, terahertz or Fourier transform spectrometers, can be used.
- spectrometers such as, for example, prism, grating, terahertz or Fourier transform spectrometers.
- most surface-scanning systems permit only a short time span for analysis since the alignment of the beam path with a point to be registered and to be surveyed is very short.
- Spectrometers which require a comparatively long duration for analysis can be used only if disadvantages are accepted, such as, for example, greater structural complexity due to the use of a plurality of spectrometers overlapping as a function of time in operation, or reduced scanning speed.
- Spectrometers which are sufficiently fast with respect to the scanning speed or effect a spatial demodulation can therefore advantageously be used.
- Fourier spectrometers based on the Michelson principle which have an inclined mirror so that a path difference results not by adjustment of the mirror but depending on location, constitute an example of the last-mentioned spectrometers.
- the resulting interference pattern is recorded by a suitable arrangement, such as, for example, a photodiode array or a CCD/CMOS camera, and subsequently subjected to a transformation or spectral resolution.
- Sufficiently fast transformations for harmonic decomposition are available for this purpose, even for the scanning process, such as, for example, the discrete Fourier transformation (DFT).
- DFT discrete Fourier transformation
- the spectral separation can therefore be effected by a spectrally selective emission, by a spectral analysis after or during reception or by a combination of the two approaches, the chosen solution also being dependent on the type of surface to be detected or analyzed and the composition thereof.
- terahertz sources which permit both a certain depth of penetration and hence an analysis down to below the surface of materials or topographies thereof as well as an improved analysis in special areas.
- Suitable terahertz technologies have long been realized, for example, for the astronomical area, more compact systems suitable in principle for a scanner application now also being available.
- Sources used may be, for example, mode-coupled titanium:sapphire lasers with photoconductive dipole antenna, femtosecond lasers with electrooptical crystals and electronic Gunn/Bloch oscillators, which, together with a reflective optical system, permit a more compact arrangement.
- On the receiver side it is possible to realize compact terahertz spectrometers, for example, based on Hilbert Transform spectrometers.
- FIG. 1 shows the scanning of an outer surface by means of a geodetic device of the prior art
- FIG. 2 shows the schematic diagram of a method of the prior art for scanning the inner surface of a tunnel by means of a geodetic device of the prior art
- FIG. 3 shows the schematic diagram of a method according to the invention for scanning the inner surface of a tunnel by means of a mobile scanning system according to the invention
- FIG. 4 shows the schematic diagram of a mobile scanning system according to the invention
- FIG. 5 shows the scanning of the inner surface of a structure in cross-section by means of a geodetic device of the prior art
- FIG. 6 shows the scanning of the inner surface of a structure by means of a geodetic device according to the invention
- FIG. 7 shows an example of a gray step recording of the inside of a tunnel with identifiable structures
- FIG. 8 shows the schematic diagram of a first working example of a scanner system according to the invention.
- FIG. 9 shows the schematic diagram of a second working example of a scanner system according to the invention.
- FIG. 10 shows the schematic diagram of a third working example of a scanner system according to the invention.
- FIG. 11 shows the schematic diagram of a fourth working example of a scanner system according to the invention.
- FIG. 12 shows the schematic diagram of a fifth working example of a scanner system according to the invention.
- FIG. 13 shows the schematic diagram of a sixth working example of a scanner system according to the invention, with integration into a geodetic measuring device.
- FIG. 1 explains by way of example the scanning of an outer surface 2 by means of a geodetic device 1 of the prior art.
- the geodetic device 1 is positioned a sufficient distance away from the outer surface 2 and scans the outer surface 2 at different angle positions, electromagnetic radiation ES being emitted for distance measurement.
- the outer surface 2 can be reconstructed from the distance measurements and the coordinated angle positions.
- the desired resolution of the surface registration determines the subdivision of the registered region into angle positions. Parallel to the distance measurements, it is also possible to record images by a camera in the geodetic device.
- FIG. 2 shows the schematic diagram of a method of the prior art for scanning the inner surface 2 ′ of a structure by means of a geodetic device 1 of the prior art.
- a geodetic device 1 of the prior art.
- the inside 2 ′ is scanned in the form of a spiral track 3 and thus registered.
- the geodetic device 1 Owing to the narrower registration area at greater depths of the structure, the geodetic device 1 generally has to be used with frequent changes in position, for example upside down.
- FIG. 3 shows the schematic diagram of a method according to the invention for scanning the inner surface 2 ′ of the same tunnel by means of a mobile scanning system 6 according to the invention.
- the mobile scanning system 6 is moved in a linear manner, the inner surface 2 ′ being scanned by electromagnetic radiation ES continuously along a spiral or zigzag track 3 ′.
- the emission direction is continuously varied by pivoting the transmitting and receiving unit 5 , the position of the mobile scanning system 6 being determined by a fixed geodetic device 1 ′, such as, for example, a motorized theodolite with automatic target tracking, which continuously measures angle and distance to a retroreflector 4 mounted on the mobile scanning system 6 .
- the radiation reflected by the inner surface 2 ′ is registered by the transmitting and receiving unit 5 and spectrally analyzed so that, in addition to the topographic contour of the surface, it is also possible to derive further information.
- FIG. 4 shows the schematic diagram of a mobile scanning system according to the invention.
- the mobile scanning system 6 is based on a carriage-like body which is mobile by means of rollers 8 .
- the transmitting and receiving unit 5 pivotable through about 180° and the retroreflector 4 together with a computing and control unit 7 are arranged on the body.
- the pivotable transmitting and receiving unit 5 moves at a speed which is chosen so that both a distance measurement and the spectral analysis can be carried out for each angle position and longitudinal position of the transmitting and receiving unit 5 .
- the electromagnetic radiation ES is emitted and received via the transmitting and receiving unit 5 , it being possible to arrange radiation source and sensor both in the pivotable transmitting and receiving unit 5 itself or at another point, such as, for example, in the body of the mobile scanning system 6 .
- a mobile scanning system 6 it is possible to register and analyze, rapidly and in a continuous process, accessible structures, in particular linear ones, with regard to form and composition of their surface, inner surfaces 2 ′ also having the advantage of a small scattered light component.
- FIG. 5 explains the scanning of the inner surface 2 ′′ of a structure in cross-section by means of a geodetic device 1 of the prior art. Scanning of the form of the inner surface 2 ′′ of a structure, which is shown here by way of example as an unlined tunnel, is effected by the electromagnetic radiation ES of the geodetic device 1 .
- the registration does not permit any conclusions about structures and changes present below the inner surface 2 ′′ or structures of the surfaces below the resolution of the distance measurement. If a camera for image recording is used in parallel, the range of analysis is extended but in particular no analysis of the chemical composition or of the spectral reflectivity of the inner surface 2 ′′ can be effected.
- a geodetic device 1 ′′ permits the scanning of the inner surface of the same structure with an extended possibility of analysis, as shown schematically in FIG. 6 .
- the electromagnetic radiation ES emitted by the geodetic device 1 is sent back by the surface as reflected radiation RS with spectral information and is received again by the geodetic device 1 ′′.
- reflected radiation RS with spectral information
- the geodetic device 1 ′′ receives again by the geodetic device 1 ′′.
- the position and extent of a water-carrying stratum 9 can be recognized from the wetting of the surface visible in the tunnel.
- liquid emerging from a pipe 10 can be recognized.
- rust on reinforcement steel meshes embedded in reinforced concrete can be recognized and localized.
- FIG. 7 shows an example of a grey step recording of the inner surface 2 ′′′ of a tunnel with identifiable structures.
- the image corresponds to a recording of a region close to the bottom of the tunnel to the tunnel ceiling with a registration range of almost 180°.
- the continuous white line in the lower image half represents the high voltage wire of an overhead line.
- Dark spots 12 in the grey step recording can be interpreted, for example, as moist areas. However, they may alternatively also be an area of peeling surface deposit, so that an analysis over and above the grey step representation is advantageous.
- FIGS. 8-13 The embodiments of the scanner system according to the invention or of a geodetic device according to the invention, shown in the following FIGS. 8-13 , are explained in abstract terms with reference to their substantial components. Details of beam guidance, such as, for example, elements of transmitting and receiving optical system, are not shown for reasons of clarity. Likewise, there is no detailed presentation of scanner components used for beam guidance or for compensating effects or artifacts produced by the scanning process. The individual working examples are only exemplary possibilities of the realizations with the use of interchangeable components. In particular, the elements and their arrangement can be combined with one another in the various FIGS. 8-13 .
- FIG. 8 shows the schematic diagram of a first working example with a rotating prism spectrometer 17 .
- a laser diode as a radiation source arranged in a distance-measuring device 20 , emits electromagnetic radiation ES via a deflection mirror 19 and a scanner wheel 13 onto the surface to be scanned.
- the scanner wheel 13 shown is typical for a scanning device known per se from the prior art.
- the radiation is received again as reflected radiation RS and guided via the scanner wheel and the deflection mirror 19 back to a distance measuring device which is arranged in the distance-measuring device 20 and which derives distance information from the reflected radiation RS, in particular by the pulse transit time or phase measuring method.
- a first beam splitter 16 which guides a part of the reflected radiation RS on to the prism spectrometer 17 is present in this beam path.
- Said spectrometer has, for example, a rotatable equilateral prism or a star-like arrangement of prisms or prism surfaces. By rotation of the prism, the geometric conditions are continuously changed and the spectral components are passed in succession on to a downstream detector 18 so that the latter registers a spectrum of the reflected radiation RS and evaluates it in downstream electronics.
- scanner wheel 13 and prism spectrometer 17 must be synchronized in their rotation so that a spectral analysis by the prism spectrometer can be effected for each surface point to be registered.
- a second beam splitter 14 outputs a further part of the reflected radiation RS, which is guided onto a camera 15 , for example a CCD or CMOS camera chip, for image acquisition and processing.
- FIG. 9 shows the schematic diagram of a second working example comprising a grating spectrometer.
- a radiation source arranged in a distance-measuring device 20 emits electromagnetic radiation ES onto the surface to be scanned via a deflection mirror 19 and a mirror surface 24 pivotable by means of a piezo element 25 about an axis 26 , as scanning device 13 ′.
- the mirror surface 24 pivotable for scanning and shown here is typical for a further scanning device known from the prior art.
- the radiation is received again as reflected radiation RS and guided via the pivotable mirror surface 24 and the deflection mirror 19 back onto a distance-measuring device arranged in the distance-measuring device 20 .
- a first beam splitter 16 outputs light from the beam path onto the grating spectrometer.
- Said spectrometer has a grating 21 which is pivotable about an axis 23 and is operated in this working example—in particular as a blazed grating—in reflection.
- a piezo element 22 is used as an adjusting device. By movement of the pivotable grating 21 , the extremes of the various orders are projected in succession onto a detector 18 so that a spectral analysis can be carried out.
- a beam path for a camera 15 is formed parallel to the axis of the receiving device for the spectrometer and the distance measuring device.
- the camera 15 can use the light of the radiation source of the distance-measuring device, a separate light source, e.g. an LED, or daylight for recording.
- a separate light source e.g. an LED
- daylight for recording it is also possible to use other types of grating spectrometers, for example a lamellar grating interferometer or a grating on a curved and adjustable mirror.
- FIG. 10 explains a third working example of a scanner system according to the invention on the basis of a schematic diagram.
- a radiation source arranged in a distance-measuring device 20 emits electromagnetic radiation ES via a dichroic deflection mirror 19 ′ and a scanner wheel 13 on to the surface to be scanned. Parallel with this, further electromagnetic radiation is input into the same beam path via the dichroic deflection mirror 19 ′, this radiation being produced by a second radiation source 27 .
- This second radiation source 27 may be, for example, in the form of a laser diode, LED or thermal emitter.
- a first beam splitter 16 outputs light from the beam path onto a first spectrally selective receiver, which consists here by way of example of the combination of detector 31 and attached spectral filter 30 .
- a second beam splitter 14 ′ outputs light to a second spectrally selective receiver, which here likewise consists of detector 29 and attached spectral filter 28 . Both spectrally selective receivers are designed so that different wavelength ranges are covered.
- the infrared radiation of the radiation source arranged in the distance-measuring device 20 is supplemented by the emission of a blue laser diode as second radiation source 27 .
- the two spectrally selective receivers are designed to be sensitive in the blue and infrared range by their coordinated filters.
- a beam path for a camera 15 is formed axially parallel to the receiving direction of the scanning wheel 13 .
- sensors instead of two detectors with coordinated filters, it is also possible to use sensors which already have spectrally narrow-band sensitivities in the relevant range. It is also possible to use a single detector which is designed to be spectrally selective by means of different, variable filters.
- FIG. 11 shows the schematic diagram of a fourth working example of the scanner system according to the invention.
- a laser diode arranged in a distance-measuring device 20 emits electromagnetic radiation ES via a deflection mirror 19 and a scanner wheel 13 onto the surface to be scanned, reflected radiation RS being received via the scanner wheel 13 and the deflection mirror 19 in a distance-measuring device of the distance-measuring device 20 after reflection by the surface to be registered.
- a first beam splitter 16 which guides a part of the reflective radiation RS on to a Fourier spectrometer in a Michelson arrangement, is present in this beam path.
- Said spectrometer has a lens 32 for collimating the reflected radiation RS and a splitter plate 33 which guides the radiation on to a first interferometer mirror 35 and a tilted mirror as a second interferometer mirror 34 .
- the radiation is guided via the splitter plate 33 with superposition onto a sensor 36 , for example a linear or two-dimensional arrangement of photodiodes, the signals of which sensor are spectrally resolved in a downstream computing unit, for example by means of discrete Fourier transformation.
- a rotatable Littrow grating which can be moved by means of a piezo element or a high-precision stepper motor. This arrangement with spatial modulation permits a rapid spectral resolution which also permits operation with fast scanner movements.
- a further part of the reflective radiation RS is output from the beam path via a second beam splitter 14 and is guided onto a camera 15 .
- FIG. 12 shows the schematic diagram of a fifth working example which, in this example, corresponds to the working example shown in FIG. 11 , except for the special type of scanning Fourier spectrometer.
- a Fourier spectrometer in the Michelson arrangement with a lens 32 for collimating the reflected radiation RS and a splitter plate 33 is likewise used.
- the radiation is guided onto a first interferometer mirror 35 and a mirror as second interferometer mirror 38 , which can be moved by a piezo actuator or an electrostatic comb as a drive in the direction of one arm of the interferometer.
- the radiation is deflected with superposition onto a sensor 36 , for example a linear or two-dimensional arrangement of photodiodes, the signals of said sensor being analyzed for spectral resolution in a downstream computing unit 37 .
- FIG. 13 shows the schematic diagram of a sixth working example as an example of the integration of a scanner system according to the invention into a geodetic measuring device.
- a distance measurement to surface points is carried out within the field of view of the theodolite by a fixed laser diode 39 and receiving device 46 .
- the laser diode 39 emits electromagnetic radiation ES via a deflection mirror element 40 onto a first inclined surface of a double-sided deflection mirror 41 , from which this radiation is emitted via an objective lens 42 with downstream wedges 43 rotatable relative to one another as a scanning device.
- a first beam splitter 16 ′ which outputs a part of the radiation onto a Fourier spectrometer comprising lens 32 ′, splitter plate 33 ′ and a first interferometer mirror 35 ′ and a second tilted interferometer mirror 34 ′ is present in the beam path to the receiving device 46 .
- the light of the two arms of the interferometer are superposed and projected onto a sensor 36 ′.
- a downstream computing unit 37 ′ serves for the Fourier transformation.
- the scanning movement of the laserbeam for scanning a surface is effected by the wedges of the alignment means 43 which are rotatable relative to one another.
- the recording of an image can be effected by a camera 15 ′ arranged in the beam path after the back-reflecting mirror element 44 and having an upstream focusing member 45 .
- FIG. 11 and FIG. 13 While in FIG. 11 and FIG. 13 , the—spatially variable—path difference in the Fourier spectrometer was produced by tilting of a mirror, in FIG. 12 a longitudinal movement of a mirror was effected, which movement likewise produced a path difference—now varying as a function of time. According to the invention, however, further Fourier spectrometers can also be used; thus, it is also possible to use a liquid crystal for polarization-dependent generation of an optical path difference in transmission, in particular with upstream polarization separation comprising quarter-wave plate and polarizer.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Remote Sensing (AREA)
- Radar, Positioning & Navigation (AREA)
- Toxicology (AREA)
- Mathematical Physics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Electromagnetism (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
- The invention relates to a scanner system for registering surfaces according to the preamble of
claim 1, a method for registering surfaces according to the preamble ofclaim 15 and a geodetic device and a mobile scanning system. - Methods which successively scan and record the topography of a structure, such as, for example, a construction, are frequently used for registering surfaces. Such a topography represents a cohesive sequence of points which describe the surface or a corresponding model or a description of the surface. A customary approach is scanning by means of a laser scanner which in each case registers the spatial position of a surface point by measuring the distance to the targeted surface point by the laser and linking this measurement to the angle information of the laser emission. From this distance and angle information, the spatial position of the registered point can be determined and the surface continuously surveyed. In many cases, image recording by a camera, which also provides further information, for example with regard to the surface texture, in addition to the overall visual view, is also carried out simultaneously with this purely geometrical registration of the surface.
- Thus, for example, WO 97/40342 describes a ground-based method which records a topography by scanner systems directed in a fixed position. For these systems, a fixed erection point which serves as a basis of a scanner process carried out by means of motors is chosen. The three-dimensional location information of the respective surface point can be derived from the distance to the measured point, the angle position at the time of the measurement and the known location of the scanning device. Scanner systems are designed especially for the object of registering topography and scan a surface by movement of the scanner system or by changing the beam path.
- In addition, scanning functions can be integrated into various other devices as additional functions. WO 2004/036145 discloses, for example, a geodetic measuring device which emits a laser beam for distance measurement from its position within the registered range. Such measuring devices can also be modified for registering surfaces by scanning or can be operated without modification. Motorized theodolites or total stations represent an example of this.
- Other methods use mobile systems which scan a structure to be registered by a movement of the scanner system or support or supplement the scanning. Such systems are particularly suitable for registering linear structures or structures which can be driven on in a linear manner, such as, for example, track installations, roads, tunnel systems or airfields.
- Such registration processes of the prior art provide images or topographical data which substantially represent the information about spatial distribution or relative arrangement of surface points. Optionally, additionally recorded images permit the derivation of further information.
- Consequently, the structure and the contour of the surface can be comparatively readily reconstructed. However, the lack of qualitative data on the type and characteristics of the surface, in particular with regard to the internal structure or composition, is disadvantageous. Thus, images recorded parallel to the scanning generally permit the identification of different brightness values. Although these can be interpreted with regard to possible structures and compositions of the surface and the underlying processes, further information must be provided for this purpose or greatly limiting assumptions must be made.
- Thus, for example, in the case of recordings of tunnel systems in the images produced in parallel, it is possible to recognize dark spots which can be interpreted as water spots. The same applies to the recognition of colored layers or top layers which separate off and which significantly change the reflection behavior of the surface. A precondition of these greatly simplified interpretations is of course a limitation of the latitude of interpretation, which is based on prior information—in this case the knowledge of water outflows or spot formations.
- A recording, in parallel with the registration of the surface, of a parameter which permits an analytical characterization of the surface over and above a simple consideration of grey step values cannot be performed by methods of the prior art.
- An object of the present invention is to provide a scanner system and a method which permits at least a qualitative analysis of a surface in parallel to the registration of the surface.
- A further object is to check or verify qualitative parameters of the surfaces.
- A further object is the provision of a system which permits a higher functionality than the pure registration of surfaces, for example by permitting a warning function in the case of a qualitative change of registered structures.
- The invention relates to a scanner system and a method for registering a surface and a geodetic measuring device equipped with the system or a mobile scanning system.
- According to the invention, the surface is spectrally probed in parallel with scanning, i.e. is scanned so that conclusions can be drawn about the composition or the state of the probed or registered surface from the spectral components of the radiation received. The spectral probing can be effected for the entire surface topography, in particular continuously, or for partial areas. In principle, a separate spectral emission or a spectral analysis can be effected after or during reception of the radiation. Likewise, the two approaches can be combined.
- For the spectrally separated or separate emission, for example, radiation can be emitted in two spectral ranges separated from one another or two partly overlapping spectral ranges, synchronously or in an alternating manner. In conventional scanner systems of the prior art, it is sufficient for this purpose, in addition to the laser radiation source already used for scanning and distance measurement, to integrate a second laser whose emission is guided over the same beam path so that the surface is scanned in an identical manner. The emitted radiation thereof may be on the long-wave but also the short-wave side of the laser conventionally used for the distance measurement, the short-wave option also being capable of permitting, for example, fluorescence measurements. In parallel or additionally, multispectral or white light sources can also be used.
- The reception can be effected, for example, with only one receiver if, in the case of alternating emission, this receives the reflection in the different spectral ranges as a function of time. In the case of simultaneous emission, for example, it is possible to use two spectrally selective receivers, from the relative intensities of which conclusions can be drawn about the material giving rise to the reflection. For example, a system can be designed for detecting rust on concrete surfaces and can emit two complementary radiations in the red and blue range. Red, rust-containing surface regions will have increased reflection in the red spectral range compared with only moist or dry concrete sections, so that, in contrast to the pure light-dark evaluation, rust can be distinguished from wet areas by this method. Such a simple method or scanner system can be used for identifying previously known patterns, as occur, for example, in the monitoring of constructions.
- Scanner systems and methods which offer higher spectral resolution and hence more comprehensive potential uses permit an extended field of use. According to the invention, spectrometers are used for this purpose in order to spectrally resolve or to analyze the radiation received. According to the invention, in principle all types of spectrometers, such as, for example, prism, grating, terahertz or Fourier transform spectrometers, can be used. However, most surface-scanning systems permit only a short time span for analysis since the alignment of the beam path with a point to be registered and to be surveyed is very short. Spectrometers which require a comparatively long duration for analysis can be used only if disadvantages are accepted, such as, for example, greater structural complexity due to the use of a plurality of spectrometers overlapping as a function of time in operation, or reduced scanning speed.
- Spectrometers which are sufficiently fast with respect to the scanning speed or effect a spatial demodulation can therefore advantageously be used. Fourier spectrometers based on the Michelson principle, which have an inclined mirror so that a path difference results not by adjustment of the mirror but depending on location, constitute an example of the last-mentioned spectrometers. The resulting interference pattern is recorded by a suitable arrangement, such as, for example, a photodiode array or a CCD/CMOS camera, and subsequently subjected to a transformation or spectral resolution. Sufficiently fast transformations for harmonic decomposition are available for this purpose, even for the scanning process, such as, for example, the discrete Fourier transformation (DFT).
- Suitable designs and methods of production for miniaturized Fourier spectrometers are described in the thesis “Micro-sized Fourier Spectrometers” by Omar Manzardo, University of Neuchatel, Switzerland, January 2002.
- According to the invention, the spectral separation can therefore be effected by a spectrally selective emission, by a spectral analysis after or during reception or by a combination of the two approaches, the chosen solution also being dependent on the type of surface to be detected or analyzed and the composition thereof.
- A further possibility is probing by means of terahertz sources, which permit both a certain depth of penetration and hence an analysis down to below the surface of materials or topographies thereof as well as an improved analysis in special areas. Suitable terahertz technologies have long been realized, for example, for the astronomical area, more compact systems suitable in principle for a scanner application now also being available. Sources used may be, for example, mode-coupled titanium:sapphire lasers with photoconductive dipole antenna, femtosecond lasers with electrooptical crystals and electronic Gunn/Bloch oscillators, which, together with a reflective optical system, permit a more compact arrangement. On the receiver side, it is possible to realize compact terahertz spectrometers, for example, based on Hilbert Transform spectrometers.
- A scanner system according to the invention and a method according to the invention are described in more detail below purely by way of example with reference to working examples shown schematically in the drawing.
- Specifically,
-
FIG. 1 shows the scanning of an outer surface by means of a geodetic device of the prior art; -
FIG. 2 shows the schematic diagram of a method of the prior art for scanning the inner surface of a tunnel by means of a geodetic device of the prior art; -
FIG. 3 shows the schematic diagram of a method according to the invention for scanning the inner surface of a tunnel by means of a mobile scanning system according to the invention; -
FIG. 4 shows the schematic diagram of a mobile scanning system according to the invention; -
FIG. 5 shows the scanning of the inner surface of a structure in cross-section by means of a geodetic device of the prior art; -
FIG. 6 shows the scanning of the inner surface of a structure by means of a geodetic device according to the invention; -
FIG. 7 shows an example of a gray step recording of the inside of a tunnel with identifiable structures; -
FIG. 8 shows the schematic diagram of a first working example of a scanner system according to the invention; -
FIG. 9 shows the schematic diagram of a second working example of a scanner system according to the invention; -
FIG. 10 shows the schematic diagram of a third working example of a scanner system according to the invention; -
FIG. 11 shows the schematic diagram of a fourth working example of a scanner system according to the invention; -
FIG. 12 shows the schematic diagram of a fifth working example of a scanner system according to the invention; and -
FIG. 13 shows the schematic diagram of a sixth working example of a scanner system according to the invention, with integration into a geodetic measuring device. -
FIG. 1 explains by way of example the scanning of anouter surface 2 by means of ageodetic device 1 of the prior art. Thegeodetic device 1 is positioned a sufficient distance away from theouter surface 2 and scans theouter surface 2 at different angle positions, electromagnetic radiation ES being emitted for distance measurement. Theouter surface 2 can be reconstructed from the distance measurements and the coordinated angle positions. The desired resolution of the surface registration determines the subdivision of the registered region into angle positions. Parallel to the distance measurements, it is also possible to record images by a camera in the geodetic device. -
FIG. 2 shows the schematic diagram of a method of the prior art for scanning theinner surface 2′ of a structure by means of ageodetic device 1 of the prior art. In a manner similar to the procedure from example 1, it is also possible to scaninner surfaces 2′ of structures, such as, for example, tunnels, underpasses or interior rooms of buildings, by means ofgeodetic devices 1. By means of the electromagnetic radiation ES, the inside 2′ is scanned in the form of aspiral track 3 and thus registered. Owing to the narrower registration area at greater depths of the structure, thegeodetic device 1 generally has to be used with frequent changes in position, for example upside down. - In comparison,
FIG. 3 shows the schematic diagram of a method according to the invention for scanning theinner surface 2′ of the same tunnel by means of amobile scanning system 6 according to the invention. Inside the tunnel, themobile scanning system 6 is moved in a linear manner, theinner surface 2′ being scanned by electromagnetic radiation ES continuously along a spiral orzigzag track 3′. The emission direction is continuously varied by pivoting the transmitting and receivingunit 5, the position of themobile scanning system 6 being determined by a fixedgeodetic device 1′, such as, for example, a motorized theodolite with automatic target tracking, which continuously measures angle and distance to aretroreflector 4 mounted on themobile scanning system 6. The radiation reflected by theinner surface 2′ is registered by the transmitting and receivingunit 5 and spectrally analyzed so that, in addition to the topographic contour of the surface, it is also possible to derive further information. -
FIG. 4 shows the schematic diagram of a mobile scanning system according to the invention. Themobile scanning system 6 is based on a carriage-like body which is mobile by means ofrollers 8. The transmitting and receivingunit 5 pivotable through about 180° and theretroreflector 4 together with a computing andcontrol unit 7 are arranged on the body. The pivotable transmitting and receivingunit 5 moves at a speed which is chosen so that both a distance measurement and the spectral analysis can be carried out for each angle position and longitudinal position of the transmitting and receivingunit 5. Here, the electromagnetic radiation ES is emitted and received via the transmitting and receivingunit 5, it being possible to arrange radiation source and sensor both in the pivotable transmitting and receivingunit 5 itself or at another point, such as, for example, in the body of themobile scanning system 6. By means of amobile scanning system 6 according to the invention, it is possible to register and analyze, rapidly and in a continuous process, accessible structures, in particular linear ones, with regard to form and composition of their surface,inner surfaces 2′ also having the advantage of a small scattered light component. -
FIG. 5 explains the scanning of theinner surface 2″ of a structure in cross-section by means of ageodetic device 1 of the prior art. Scanning of the form of theinner surface 2″ of a structure, which is shown here by way of example as an unlined tunnel, is effected by the electromagnetic radiation ES of thegeodetic device 1. The registration does not permit any conclusions about structures and changes present below theinner surface 2″ or structures of the surfaces below the resolution of the distance measurement. If a camera for image recording is used in parallel, the range of analysis is extended but in particular no analysis of the chemical composition or of the spectral reflectivity of theinner surface 2″ can be effected. - In comparison, a
geodetic device 1″ according to the invention permits the scanning of the inner surface of the same structure with an extended possibility of analysis, as shown schematically inFIG. 6 . The electromagnetic radiation ES emitted by thegeodetic device 1 is sent back by the surface as reflected radiation RS with spectral information and is received again by thegeodetic device 1″. Depending on the composition of the surface, there is a change in the spectrum of the reflected radiation RS compared with the emission. Thus, on the basis of the spectral distribution or of the harmonic components, it is also possible to identify structures below the surface. In this example, the position and extent of a water-carryingstratum 9 can be recognized from the wetting of the surface visible in the tunnel. Likewise, liquid emerging from apipe 10 can be recognized. In a similar manner, however, rust on reinforcement steel meshes embedded in reinforced concrete can be recognized and localized. In combination with marking substances which have particular spectral susceptibility, it is possible according to the invention also to carry out a search for leaks by loading the pipe to be investigated with the marking substance and localizing the point of emergence by means of a scanner system. -
FIG. 7 shows an example of a grey step recording of theinner surface 2′″ of a tunnel with identifiable structures. The image corresponds to a recording of a region close to the bottom of the tunnel to the tunnel ceiling with a registration range of almost 180°. The continuous white line in the lower image half represents the high voltage wire of an overhead line.Dark spots 12 in the grey step recording can be interpreted, for example, as moist areas. However, they may alternatively also be an area of peeling surface deposit, so that an analysis over and above the grey step representation is advantageous. - The embodiments of the scanner system according to the invention or of a geodetic device according to the invention, shown in the following
FIGS. 8-13 , are explained in abstract terms with reference to their substantial components. Details of beam guidance, such as, for example, elements of transmitting and receiving optical system, are not shown for reasons of clarity. Likewise, there is no detailed presentation of scanner components used for beam guidance or for compensating effects or artifacts produced by the scanning process. The individual working examples are only exemplary possibilities of the realizations with the use of interchangeable components. In particular, the elements and their arrangement can be combined with one another in the variousFIGS. 8-13 . -
FIG. 8 shows the schematic diagram of a first working example with arotating prism spectrometer 17. A laser diode as a radiation source, arranged in a distance-measuringdevice 20, emits electromagnetic radiation ES via adeflection mirror 19 and ascanner wheel 13 onto the surface to be scanned. Here, thescanner wheel 13 shown is typical for a scanning device known per se from the prior art. After reflection by the surface to be registered, the radiation is received again as reflected radiation RS and guided via the scanner wheel and thedeflection mirror 19 back to a distance measuring device which is arranged in the distance-measuringdevice 20 and which derives distance information from the reflected radiation RS, in particular by the pulse transit time or phase measuring method. - A
first beam splitter 16 which guides a part of the reflected radiation RS on to theprism spectrometer 17 is present in this beam path. Said spectrometer has, for example, a rotatable equilateral prism or a star-like arrangement of prisms or prism surfaces. By rotation of the prism, the geometric conditions are continuously changed and the spectral components are passed in succession on to adownstream detector 18 so that the latter registers a spectrum of the reflected radiation RS and evaluates it in downstream electronics. Here,scanner wheel 13 andprism spectrometer 17 must be synchronized in their rotation so that a spectral analysis by the prism spectrometer can be effected for each surface point to be registered. Asecond beam splitter 14 outputs a further part of the reflected radiation RS, which is guided onto acamera 15, for example a CCD or CMOS camera chip, for image acquisition and processing. -
FIG. 9 shows the schematic diagram of a second working example comprising a grating spectrometer. A radiation source arranged in a distance-measuringdevice 20 emits electromagnetic radiation ES onto the surface to be scanned via adeflection mirror 19 and amirror surface 24 pivotable by means of apiezo element 25 about anaxis 26, as scanningdevice 13′. Themirror surface 24 pivotable for scanning and shown here is typical for a further scanning device known from the prior art. After reflection by the surface to be registered, the radiation is received again as reflected radiation RS and guided via thepivotable mirror surface 24 and thedeflection mirror 19 back onto a distance-measuring device arranged in the distance-measuringdevice 20. Afirst beam splitter 16 outputs light from the beam path onto the grating spectrometer. Said spectrometer has a grating 21 which is pivotable about anaxis 23 and is operated in this working example—in particular as a blazed grating—in reflection. Apiezo element 22 is used as an adjusting device. By movement of thepivotable grating 21, the extremes of the various orders are projected in succession onto adetector 18 so that a spectral analysis can be carried out. A beam path for acamera 15 is formed parallel to the axis of the receiving device for the spectrometer and the distance measuring device. Depending on sensitivity and intended use, thecamera 15 can use the light of the radiation source of the distance-measuring device, a separate light source, e.g. an LED, or daylight for recording. According to the invention, it is also possible to use other types of grating spectrometers, for example a lamellar grating interferometer or a grating on a curved and adjustable mirror. -
FIG. 10 explains a third working example of a scanner system according to the invention on the basis of a schematic diagram. A radiation source arranged in a distance-measuringdevice 20 emits electromagnetic radiation ES via adichroic deflection mirror 19′ and ascanner wheel 13 on to the surface to be scanned. Parallel with this, further electromagnetic radiation is input into the same beam path via thedichroic deflection mirror 19′, this radiation being produced by asecond radiation source 27. Thissecond radiation source 27 may be, for example, in the form of a laser diode, LED or thermal emitter. After reflection by the surface to be registered, the radiation is received again as reflected radiation RS and is guided via thescanner wheel 13 and thedichroic deflection mirror 19′ back to a distance-measuring device arranged in the distance-measuringdevice 20. Afirst beam splitter 16 outputs light from the beam path onto a first spectrally selective receiver, which consists here by way of example of the combination ofdetector 31 and attachedspectral filter 30. In an analogous manner, asecond beam splitter 14′ outputs light to a second spectrally selective receiver, which here likewise consists ofdetector 29 and attachedspectral filter 28. Both spectrally selective receivers are designed so that different wavelength ranges are covered. From the ratio of the registered intensities, estimates or simple identifications of surface features can be derived. In this working example, the infrared radiation of the radiation source arranged in the distance-measuringdevice 20 is supplemented by the emission of a blue laser diode assecond radiation source 27. The two spectrally selective receivers are designed to be sensitive in the blue and infrared range by their coordinated filters. A beam path for acamera 15 is formed axially parallel to the receiving direction of thescanning wheel 13. Alternatively, instead of two detectors with coordinated filters, it is also possible to use sensors which already have spectrally narrow-band sensitivities in the relevant range. It is also possible to use a single detector which is designed to be spectrally selective by means of different, variable filters. -
FIG. 11 shows the schematic diagram of a fourth working example of the scanner system according to the invention. A laser diode arranged in a distance-measuringdevice 20 emits electromagnetic radiation ES via adeflection mirror 19 and ascanner wheel 13 onto the surface to be scanned, reflected radiation RS being received via thescanner wheel 13 and thedeflection mirror 19 in a distance-measuring device of the distance-measuringdevice 20 after reflection by the surface to be registered. Afirst beam splitter 16, which guides a part of the reflective radiation RS on to a Fourier spectrometer in a Michelson arrangement, is present in this beam path. Said spectrometer has alens 32 for collimating the reflected radiation RS and asplitter plate 33 which guides the radiation on to afirst interferometer mirror 35 and a tilted mirror as asecond interferometer mirror 34. The radiation is guided via thesplitter plate 33 with superposition onto asensor 36, for example a linear or two-dimensional arrangement of photodiodes, the signals of which sensor are spectrally resolved in a downstream computing unit, for example by means of discrete Fourier transformation. Instead of the tilting mirror assecond interferometer mirror 34, it is also possible to use a rotatable Littrow grating which can be moved by means of a piezo element or a high-precision stepper motor. This arrangement with spatial modulation permits a rapid spectral resolution which also permits operation with fast scanner movements. For the parallel image recording, a further part of the reflective radiation RS is output from the beam path via asecond beam splitter 14 and is guided onto acamera 15. -
FIG. 12 shows the schematic diagram of a fifth working example which, in this example, corresponds to the working example shown inFIG. 11 , except for the special type of scanning Fourier spectrometer. In this fifth working example, a Fourier spectrometer in the Michelson arrangement with alens 32 for collimating the reflected radiation RS and asplitter plate 33 is likewise used. The radiation is guided onto afirst interferometer mirror 35 and a mirror assecond interferometer mirror 38, which can be moved by a piezo actuator or an electrostatic comb as a drive in the direction of one arm of the interferometer. By means of thesplitter plate 33, the radiation is deflected with superposition onto asensor 36, for example a linear or two-dimensional arrangement of photodiodes, the signals of said sensor being analyzed for spectral resolution in adownstream computing unit 37. -
FIG. 13 shows the schematic diagram of a sixth working example as an example of the integration of a scanner system according to the invention into a geodetic measuring device. In a theodolite having a scanning device, a distance measurement to surface points is carried out within the field of view of the theodolite by a fixedlaser diode 39 and receivingdevice 46. Thelaser diode 39 emits electromagnetic radiation ES via adeflection mirror element 40 onto a first inclined surface of a double-sided deflection mirror 41, from which this radiation is emitted via anobjective lens 42 withdownstream wedges 43 rotatable relative to one another as a scanning device. The radiation received again via theobjective lens 42 after reflection is guided onto the second surface of thedeflection mirror element 41 by a back-reflectingmirror element 44 and from there to the fixed receivingdevice 46. Afirst beam splitter 16′ which outputs a part of the radiation onto a Fourierspectrometer comprising lens 32′,splitter plate 33′ and afirst interferometer mirror 35′ and a second tiltedinterferometer mirror 34′ is present in the beam path to the receivingdevice 46. In a procedure analogous to the arrangement inFIG. 11 , the light of the two arms of the interferometer are superposed and projected onto asensor 36′. Adownstream computing unit 37′ serves for the Fourier transformation. In this working example, the scanning movement of the laserbeam for scanning a surface is effected by the wedges of the alignment means 43 which are rotatable relative to one another. The recording of an image can be effected by acamera 15′ arranged in the beam path after the back-reflectingmirror element 44 and having an upstream focusingmember 45. - While in
FIG. 11 andFIG. 13 , the—spatially variable—path difference in the Fourier spectrometer was produced by tilting of a mirror, inFIG. 12 a longitudinal movement of a mirror was effected, which movement likewise produced a path difference—now varying as a function of time. According to the invention, however, further Fourier spectrometers can also be used; thus, it is also possible to use a liquid crystal for polarization-dependent generation of an optical path difference in transmission, in particular with upstream polarization separation comprising quarter-wave plate and polarizer.
Claims (24)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04014704A EP1610091A1 (en) | 2004-06-23 | 2004-06-23 | Scanner system and method for surface acquisition |
EP04014704 | 2004-06-23 | ||
EP04014704.3 | 2004-06-23 | ||
PCT/EP2005/052880 WO2006000552A1 (en) | 2004-06-23 | 2005-06-21 | Scanner system and method for registering surfaces |
Publications (2)
Publication Number | Publication Date |
---|---|
US20110032507A1 true US20110032507A1 (en) | 2011-02-10 |
US8379191B2 US8379191B2 (en) | 2013-02-19 |
Family
ID=34925454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/610,650 Active 2028-03-21 US8379191B2 (en) | 2004-06-23 | 2005-06-21 | Scanner system and method for registering surfaces |
Country Status (8)
Country | Link |
---|---|
US (1) | US8379191B2 (en) |
EP (2) | EP1610091A1 (en) |
JP (1) | JP2008503741A (en) |
CN (1) | CN1973180B (en) |
AT (1) | ATE512350T1 (en) |
AU (1) | AU2005256622A1 (en) |
CA (1) | CA2571716C (en) |
WO (1) | WO2006000552A1 (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120081691A1 (en) * | 2010-09-30 | 2012-04-05 | Kabushiki Kaisha Topcon | Measuring Method And Measuring Instrument |
US8923359B1 (en) * | 2010-08-06 | 2014-12-30 | Lockheed Martin Corporation | Long cavity laser sensor for large FOV auto-tracking |
US9046361B2 (en) | 2010-07-07 | 2015-06-02 | Leica Geosytems Ag | Target point recognition method and surveying instrument |
DE112012001709B4 (en) * | 2011-04-15 | 2016-01-21 | Faro Technologies, Inc. | Method of measuring three or more sets of faces on an object surface |
US9826918B2 (en) | 2015-08-28 | 2017-11-28 | Juergen Marx | Method and device for detecting the surface structure and properties of a probe |
US9967545B2 (en) | 2011-04-15 | 2018-05-08 | Faro Technologies, Inc. | System and method of acquiring three-dimensional coordinates using multiple coordinate measurment devices |
US10209059B2 (en) | 2010-04-21 | 2019-02-19 | Faro Technologies, Inc. | Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker |
US10267619B2 (en) | 2011-04-15 | 2019-04-23 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
WO2020031054A1 (en) | 2018-08-06 | 2020-02-13 | The State Of Israel, Ministry Of Agriculture & Rural Development, Agricultural Research Org.The State Of Israel, Ministry Of Agriculture & Rural Development, Agricultural Research Organization (Aro) (Volcani Center). | Hyperspectral scanner |
CN111964590A (en) * | 2020-08-24 | 2020-11-20 | 湖南致力工程科技有限公司 | A kind of installation method of laser scanner in the process of automatic monitoring and early warning of tunnel |
CN112345512A (en) * | 2020-09-30 | 2021-02-09 | 钢研纳克检测技术股份有限公司 | Global component analysis device and method for oversized tubular and bar-shaped metal material |
US11506759B2 (en) * | 2017-11-17 | 2022-11-22 | Topcon Corporation | Surveying instrument and surveying instrument system |
US11536567B2 (en) * | 2017-09-13 | 2022-12-27 | Topcon Corporation | Surveying instrument |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4817826B2 (en) * | 2005-11-09 | 2011-11-16 | 国立大学法人東北大学 | Inspection system |
DE102006031114B4 (en) * | 2006-06-29 | 2008-07-03 | Kst Gmbh Kamera & System Technik | 3D combination meter from digital camera and laser scanner |
DE102006031580A1 (en) | 2006-07-03 | 2008-01-17 | Faro Technologies, Inc., Lake Mary | Method and device for the three-dimensional detection of a spatial area |
CN101636632B (en) | 2007-01-26 | 2012-05-30 | 特里伯耶拿有限公司 | Optical instrument and method for obtaining distance and image information |
WO2008089791A1 (en) | 2007-01-26 | 2008-07-31 | Trimble Jena Gmbh | Optical instrument and method for obtaining distance and image information |
JP5072675B2 (en) | 2007-04-03 | 2012-11-14 | 四国化成工業株式会社 | Method for producing 2-haloimidazole compound |
DE102009010465B3 (en) | 2009-02-13 | 2010-05-27 | Faro Technologies, Inc., Lake Mary | laser scanner |
DE102009015920B4 (en) | 2009-03-25 | 2014-11-20 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
US9551575B2 (en) | 2009-03-25 | 2017-01-24 | Faro Technologies, Inc. | Laser scanner having a multi-color light source and real-time color receiver |
DE102009035337A1 (en) | 2009-07-22 | 2011-01-27 | Faro Technologies, Inc., Lake Mary | Method for optically scanning and measuring an object |
DE102009035336B3 (en) | 2009-07-22 | 2010-11-18 | Faro Technologies, Inc., Lake Mary | Device for optical scanning and measuring of environment, has optical measuring device for collection of ways as ensemble between different centers returning from laser scanner |
DE102009055989B4 (en) | 2009-11-20 | 2017-02-16 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
DE102009055988B3 (en) | 2009-11-20 | 2011-03-17 | Faro Technologies, Inc., Lake Mary | Device, particularly laser scanner, for optical scanning and measuring surrounding area, has light transmitter that transmits transmission light ray by rotor mirror |
US9113023B2 (en) | 2009-11-20 | 2015-08-18 | Faro Technologies, Inc. | Three-dimensional scanner with spectroscopic energy detector |
US9529083B2 (en) | 2009-11-20 | 2016-12-27 | Faro Technologies, Inc. | Three-dimensional scanner with enhanced spectroscopic energy detector |
DE102009057101A1 (en) | 2009-11-20 | 2011-05-26 | Faro Technologies, Inc., Lake Mary | Device for optically scanning and measuring an environment |
US9210288B2 (en) | 2009-11-20 | 2015-12-08 | Faro Technologies, Inc. | Three-dimensional scanner with dichroic beam splitters to capture a variety of signals |
US9879976B2 (en) | 2010-01-20 | 2018-01-30 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine that uses a 2D camera to determine 3D coordinates of smoothly continuous edge features |
US9628775B2 (en) | 2010-01-20 | 2017-04-18 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
US9163922B2 (en) | 2010-01-20 | 2015-10-20 | Faro Technologies, Inc. | Coordinate measurement machine with distance meter and camera to determine dimensions within camera images |
US9607239B2 (en) | 2010-01-20 | 2017-03-28 | Faro Technologies, Inc. | Articulated arm coordinate measurement machine having a 2D camera and method of obtaining 3D representations |
GB2489347B (en) | 2010-01-20 | 2014-09-17 | Faro Tech Inc | Coordinate measurement device |
DE102010020925B4 (en) | 2010-05-10 | 2014-02-27 | Faro Technologies, Inc. | Method for optically scanning and measuring an environment |
DE102010032724A1 (en) * | 2010-07-26 | 2012-01-26 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
DE102010032723B3 (en) | 2010-07-26 | 2011-11-24 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
DE102010032725B4 (en) | 2010-07-26 | 2012-04-26 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
DE102010032726B3 (en) | 2010-07-26 | 2011-11-24 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
DE102010033561B3 (en) * | 2010-07-29 | 2011-12-15 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
US9168654B2 (en) | 2010-11-16 | 2015-10-27 | Faro Technologies, Inc. | Coordinate measuring machines with dual layer arm |
US9222771B2 (en) | 2011-10-17 | 2015-12-29 | Kla-Tencor Corp. | Acquisition of information for a construction site |
DE102012100609A1 (en) | 2012-01-25 | 2013-07-25 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
AT512168B1 (en) | 2012-01-30 | 2013-06-15 | Sola Messwerkzeuge Gmbh | MARKING PROJECTOR |
US9891320B2 (en) | 2012-01-30 | 2018-02-13 | Hexagon Technology Center Gmbh | Measurement system with a measuring device and a scanning module |
EP2620745A1 (en) | 2012-01-30 | 2013-07-31 | Hexagon Technology Center GmbH | Measuring system with a measuring device and a scan module |
EP2620746A1 (en) | 2012-01-30 | 2013-07-31 | Hexagon Technology Center GmbH | Surveying device with scan functionality and single-point measuring mode |
CN102721365B (en) * | 2012-06-01 | 2015-04-15 | 北京交通大学 | Method and device for high-speed and accurate measurement of tunnel section |
US8997362B2 (en) | 2012-07-17 | 2015-04-07 | Faro Technologies, Inc. | Portable articulated arm coordinate measuring machine with optical communications bus |
KR101908304B1 (en) * | 2012-08-10 | 2018-12-18 | 엘지전자 주식회사 | Distance detecting device and Image processing apparatus including the same |
DE102012107544B3 (en) | 2012-08-17 | 2013-05-23 | Faro Technologies, Inc. | Optical scanning device i.e. laser scanner, for evaluating environment, has planetary gears driven by motor over vertical motor shaft and rotating measuring head relative to foot, where motor shaft is arranged coaxial to vertical axle |
DE102012217800A1 (en) * | 2012-09-28 | 2014-04-03 | Carl Zeiss Smt Gmbh | Diffractive optical element and measuring method |
DE102012109481A1 (en) | 2012-10-05 | 2014-04-10 | Faro Technologies, Inc. | Device for optically scanning and measuring an environment |
US9513107B2 (en) | 2012-10-05 | 2016-12-06 | Faro Technologies, Inc. | Registration calculation between three-dimensional (3D) scans based on two-dimensional (2D) scan data from a 3D scanner |
US10067231B2 (en) | 2012-10-05 | 2018-09-04 | Faro Technologies, Inc. | Registration calculation of three-dimensional scanner data performed between scans based on measurements by two-dimensional scanner |
DE102014203918B4 (en) * | 2014-03-04 | 2016-09-15 | Jürgen Marx | Methods and devices for detecting the surface structure and nature of a sample |
CN104330074B (en) * | 2014-11-03 | 2017-01-18 | 广州欧科信息技术股份有限公司 | Intelligent surveying and mapping platform and realizing method thereof |
JP6465345B2 (en) * | 2014-12-26 | 2019-02-06 | 株式会社荏原製作所 | Method and apparatus for measuring surface properties of polishing pad |
CN105698749A (en) * | 2015-02-13 | 2016-06-22 | 北京雷动云合智能技术有限公司 | Laser distance measuring sensor |
DE102015122844A1 (en) | 2015-12-27 | 2017-06-29 | Faro Technologies, Inc. | 3D measuring device with battery pack |
WO2017117320A1 (en) * | 2015-12-30 | 2017-07-06 | Empire Technology Development Llc | Apparatus for analysis of irregular surface using electromagnetic energy |
CN105973211A (en) * | 2016-06-15 | 2016-09-28 | 常州华达科捷光电仪器有限公司 | Laser scanning lofting device |
DE102017201362A1 (en) * | 2017-01-27 | 2018-08-02 | Jürgen Marx | Method and device for detecting the surface structure and nature of a sample |
DE102017107245B4 (en) | 2017-04-04 | 2024-07-25 | Prüftechnik Dieter Busch GmbH | Device and method for measuring cavities and use of the device for determining roll alignments |
JP6778148B2 (en) * | 2017-06-01 | 2020-10-28 | 鹿島建設株式会社 | Evaluation method and evaluation system |
CN108693141A (en) * | 2018-01-25 | 2018-10-23 | 上海大学 | Laser and infrared compound non-destructive detecting device and method |
JP7418782B2 (en) * | 2019-09-03 | 2024-01-22 | 国立研究開発法人産業技術総合研究所 | measurement analysis system |
DE102019219942A1 (en) | 2019-12-18 | 2021-06-24 | Robert Bosch Gesellschaft mit beschränkter Haftung | Method for determining a spectrum from a sample and optical analysis device |
US11874223B1 (en) | 2022-08-30 | 2024-01-16 | The Goodyear Tire & Rubber Company | Terahertz characterization of a multi-layered tire tread |
DE102023002730B4 (en) | 2023-07-03 | 2025-02-06 | Mercedes-Benz Group AG | Device and method for quality assurance in surface treatments by means of a laser beam and use of the same |
DE102023127268A1 (en) | 2023-10-06 | 2025-04-10 | Grandperspective GmbH | Optical sensor, system and method for monitoring airspace for a terrain |
Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4627734A (en) * | 1983-06-30 | 1986-12-09 | Canadian Patents And Development Limited | Three dimensional imaging method and device |
US4645347A (en) * | 1985-04-30 | 1987-02-24 | Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee | Three dimensional imaging device |
US4800271A (en) * | 1987-06-23 | 1989-01-24 | Canadian Patents & Development Ltd. | Galvanometric optical scanning system having synchronization photodetectors |
US5018854A (en) * | 1989-04-17 | 1991-05-28 | National Research Council Of Canada | Three dimensional imaging device |
US5075561A (en) * | 1989-08-24 | 1991-12-24 | National Research Council Of Canada/Conseil National De Recherches Du Canada | Three dimensional imaging device comprising a lens system for simultaneous measurement of a range of points on a target surface |
US5177556A (en) * | 1990-05-24 | 1993-01-05 | National Research Council Of Canada | Three dimensional color imaging |
US5296702A (en) * | 1992-07-28 | 1994-03-22 | Patchen California | Structure and method for differentiating one object from another object |
US5701173A (en) * | 1996-02-20 | 1997-12-23 | National Research Council Of Canada | Method and apparatus for reducing the unwanted effects of noise present in a three dimensional color imaging system |
US5708498A (en) * | 1996-03-04 | 1998-01-13 | National Research Council Of Canada | Three dimensional color imaging |
US5837997A (en) * | 1992-07-28 | 1998-11-17 | Patchen, Inc. | Structure and method for detecting plants in a field using a light pipe |
US5946645A (en) * | 1997-04-09 | 1999-08-31 | National Research Council Of Canada | Three dimensional imaging method and device |
US6009359A (en) * | 1996-09-18 | 1999-12-28 | National Research Council Of Canada | Mobile system for indoor 3-D mapping and creating virtual environments |
US6043506A (en) * | 1997-08-13 | 2000-03-28 | Bio-Rad Laboratories, Inc. | Multi parameter scanner |
US6271918B2 (en) * | 1999-02-04 | 2001-08-07 | National Research Council Of Canada | Virtual multiple aperture 3-D range sensor |
US6297488B1 (en) * | 1999-04-29 | 2001-10-02 | National Research Council Of Canada | Position sensitive light spot detector |
US6330523B1 (en) * | 1996-04-24 | 2001-12-11 | Cyra Technologies, Inc. | Integrated system for quickly and accurately imaging and modeling three-dimensional objects |
US6507036B1 (en) * | 1999-06-01 | 2003-01-14 | National Research Council Of Canada | Three dimensional optical scanning |
US6806953B2 (en) * | 2001-10-12 | 2004-10-19 | Leica Microsystems Heidelberg Gmbh | Method for fluorescence microscopy, and fluorescence microscope |
US20040232317A1 (en) * | 2003-05-19 | 2004-11-25 | Haruo Ura | Laser measurement apparatus |
US7012615B2 (en) * | 2004-02-12 | 2006-03-14 | Pixar | Using polynomial texture maps for micro-scale occlusions |
US7202776B2 (en) * | 1997-10-22 | 2007-04-10 | Intelligent Technologies International, Inc. | Method and system for detecting objects external to a vehicle |
US20080319321A1 (en) * | 2006-05-24 | 2008-12-25 | Gunter Goldbach | Terahertz imaging |
USRE41175E1 (en) * | 2002-01-22 | 2010-03-30 | Intelisum, Inc. | GPS-enhanced system and method for automatically capturing and co-registering virtual models of a site |
US7916278B2 (en) * | 2004-04-06 | 2011-03-29 | Bae Systems Information And Electronic Systems Integration Inc. | Polyspectral rangefinder for close-in target ranging and identification of incoming threats |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1332633C (en) | 1989-07-14 | 1994-10-18 | Marc Rioux | Three-dimensional image reproduction |
AUPR810901A0 (en) * | 2001-10-05 | 2001-10-25 | Autech Research Pty. Limited | Measurment device |
CA2502012C (en) | 2002-10-12 | 2012-07-10 | Leica Geosystems Ag | Electronic display and control device for a measuring device |
-
2004
- 2004-06-23 EP EP04014704A patent/EP1610091A1/en not_active Withdrawn
-
2005
- 2005-06-21 AT AT05756836T patent/ATE512350T1/en active
- 2005-06-21 US US11/610,650 patent/US8379191B2/en active Active
- 2005-06-21 CN CN2005800208009A patent/CN1973180B/en active Active
- 2005-06-21 JP JP2007517288A patent/JP2008503741A/en not_active Withdrawn
- 2005-06-21 AU AU2005256622A patent/AU2005256622A1/en not_active Abandoned
- 2005-06-21 WO PCT/EP2005/052880 patent/WO2006000552A1/en active Application Filing
- 2005-06-21 CA CA2571716A patent/CA2571716C/en not_active Expired - Fee Related
- 2005-06-21 EP EP05756836A patent/EP1759172B1/en active Active
Patent Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4627734A (en) * | 1983-06-30 | 1986-12-09 | Canadian Patents And Development Limited | Three dimensional imaging method and device |
US4645347A (en) * | 1985-04-30 | 1987-02-24 | Canadian Patents And Development Limited-Societe Canadienne Des Brevets Et D'exploitation Limitee | Three dimensional imaging device |
US4800271A (en) * | 1987-06-23 | 1989-01-24 | Canadian Patents & Development Ltd. | Galvanometric optical scanning system having synchronization photodetectors |
US5018854A (en) * | 1989-04-17 | 1991-05-28 | National Research Council Of Canada | Three dimensional imaging device |
US5075561A (en) * | 1989-08-24 | 1991-12-24 | National Research Council Of Canada/Conseil National De Recherches Du Canada | Three dimensional imaging device comprising a lens system for simultaneous measurement of a range of points on a target surface |
US5177556A (en) * | 1990-05-24 | 1993-01-05 | National Research Council Of Canada | Three dimensional color imaging |
US5296702A (en) * | 1992-07-28 | 1994-03-22 | Patchen California | Structure and method for differentiating one object from another object |
US5837997A (en) * | 1992-07-28 | 1998-11-17 | Patchen, Inc. | Structure and method for detecting plants in a field using a light pipe |
US5701173A (en) * | 1996-02-20 | 1997-12-23 | National Research Council Of Canada | Method and apparatus for reducing the unwanted effects of noise present in a three dimensional color imaging system |
US5708498A (en) * | 1996-03-04 | 1998-01-13 | National Research Council Of Canada | Three dimensional color imaging |
US6330523B1 (en) * | 1996-04-24 | 2001-12-11 | Cyra Technologies, Inc. | Integrated system for quickly and accurately imaging and modeling three-dimensional objects |
US6009359A (en) * | 1996-09-18 | 1999-12-28 | National Research Council Of Canada | Mobile system for indoor 3-D mapping and creating virtual environments |
US5946645A (en) * | 1997-04-09 | 1999-08-31 | National Research Council Of Canada | Three dimensional imaging method and device |
US6043506A (en) * | 1997-08-13 | 2000-03-28 | Bio-Rad Laboratories, Inc. | Multi parameter scanner |
US7202776B2 (en) * | 1997-10-22 | 2007-04-10 | Intelligent Technologies International, Inc. | Method and system for detecting objects external to a vehicle |
US6271918B2 (en) * | 1999-02-04 | 2001-08-07 | National Research Council Of Canada | Virtual multiple aperture 3-D range sensor |
US6297488B1 (en) * | 1999-04-29 | 2001-10-02 | National Research Council Of Canada | Position sensitive light spot detector |
US6507036B1 (en) * | 1999-06-01 | 2003-01-14 | National Research Council Of Canada | Three dimensional optical scanning |
US6806953B2 (en) * | 2001-10-12 | 2004-10-19 | Leica Microsystems Heidelberg Gmbh | Method for fluorescence microscopy, and fluorescence microscope |
USRE41175E1 (en) * | 2002-01-22 | 2010-03-30 | Intelisum, Inc. | GPS-enhanced system and method for automatically capturing and co-registering virtual models of a site |
US20040232317A1 (en) * | 2003-05-19 | 2004-11-25 | Haruo Ura | Laser measurement apparatus |
US7012615B2 (en) * | 2004-02-12 | 2006-03-14 | Pixar | Using polynomial texture maps for micro-scale occlusions |
US7916278B2 (en) * | 2004-04-06 | 2011-03-29 | Bae Systems Information And Electronic Systems Integration Inc. | Polyspectral rangefinder for close-in target ranging and identification of incoming threats |
US20080319321A1 (en) * | 2006-05-24 | 2008-12-25 | Gunter Goldbach | Terahertz imaging |
Non-Patent Citations (2)
Title |
---|
Deck, Lesie, DeGroot Pater, High-Speed Noncontact Profiler Based on the Scanning White-Light Interferometer. Applied Optics. Vol.33, No.21, Nov 1994. * |
Seigen Peter, Terahertz Technology, IEEE Transactions on Microwave Theory and Techniques, Vol.50, No.3, March 2002. * |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10209059B2 (en) | 2010-04-21 | 2019-02-19 | Faro Technologies, Inc. | Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker |
US10480929B2 (en) | 2010-04-21 | 2019-11-19 | Faro Technologies, Inc. | Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker |
US9046361B2 (en) | 2010-07-07 | 2015-06-02 | Leica Geosytems Ag | Target point recognition method and surveying instrument |
US8923359B1 (en) * | 2010-08-06 | 2014-12-30 | Lockheed Martin Corporation | Long cavity laser sensor for large FOV auto-tracking |
US8908169B2 (en) * | 2010-09-30 | 2014-12-09 | Kabushiki Kaisha Topcon | Measuring method and measuring instrument |
US20120081691A1 (en) * | 2010-09-30 | 2012-04-05 | Kabushiki Kaisha Topcon | Measuring Method And Measuring Instrument |
US10578423B2 (en) | 2011-04-15 | 2020-03-03 | Faro Technologies, Inc. | Diagnosing multipath interference and eliminating multipath interference in 3D scanners using projection patterns |
DE112012001709B4 (en) * | 2011-04-15 | 2016-01-21 | Faro Technologies, Inc. | Method of measuring three or more sets of faces on an object surface |
US9967545B2 (en) | 2011-04-15 | 2018-05-08 | Faro Technologies, Inc. | System and method of acquiring three-dimensional coordinates using multiple coordinate measurment devices |
US10267619B2 (en) | 2011-04-15 | 2019-04-23 | Faro Technologies, Inc. | Three-dimensional coordinate scanner and method of operation |
US10302413B2 (en) | 2011-04-15 | 2019-05-28 | Faro Technologies, Inc. | Six degree-of-freedom laser tracker that cooperates with a remote sensor |
US9826918B2 (en) | 2015-08-28 | 2017-11-28 | Juergen Marx | Method and device for detecting the surface structure and properties of a probe |
US11536567B2 (en) * | 2017-09-13 | 2022-12-27 | Topcon Corporation | Surveying instrument |
US11506759B2 (en) * | 2017-11-17 | 2022-11-22 | Topcon Corporation | Surveying instrument and surveying instrument system |
WO2020031054A1 (en) | 2018-08-06 | 2020-02-13 | The State Of Israel, Ministry Of Agriculture & Rural Development, Agricultural Research Org.The State Of Israel, Ministry Of Agriculture & Rural Development, Agricultural Research Organization (Aro) (Volcani Center). | Hyperspectral scanner |
CN112513594A (en) * | 2018-08-06 | 2021-03-16 | 以色列国家农业部、农村发展农业研究组织·沃尔卡尼中心 | Hyperspectral scanner |
EP3811042A4 (en) * | 2018-08-06 | 2021-08-11 | The State of Israel, Ministry of Agriculture and Rural Development, Agricultural Research Organization (ARO) (Volcani Center) | HYPERSPECTRAL SCANNER |
US12163838B2 (en) | 2018-08-06 | 2024-12-10 | The State Of Israel, Ministry Of Agriculture & Rural Development Agricultural Research Organization (Aro) | Hyperspectral scanner |
CN111964590A (en) * | 2020-08-24 | 2020-11-20 | 湖南致力工程科技有限公司 | A kind of installation method of laser scanner in the process of automatic monitoring and early warning of tunnel |
CN112345512A (en) * | 2020-09-30 | 2021-02-09 | 钢研纳克检测技术股份有限公司 | Global component analysis device and method for oversized tubular and bar-shaped metal material |
Also Published As
Publication number | Publication date |
---|---|
JP2008503741A (en) | 2008-02-07 |
US8379191B2 (en) | 2013-02-19 |
CA2571716C (en) | 2014-04-22 |
WO2006000552A8 (en) | 2006-02-16 |
EP1759172B1 (en) | 2011-06-08 |
ATE512350T1 (en) | 2011-06-15 |
WO2006000552A1 (en) | 2006-01-05 |
CN1973180B (en) | 2010-09-01 |
CN1973180A (en) | 2007-05-30 |
EP1759172A1 (en) | 2007-03-07 |
CA2571716A1 (en) | 2006-01-05 |
EP1610091A1 (en) | 2005-12-28 |
AU2005256622A1 (en) | 2006-01-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8379191B2 (en) | Scanner system and method for registering surfaces | |
JP4350385B2 (en) | Method for automatically searching for target marks, device for automatically searching for target marks, receiving unit, geodometer and geodetic system | |
US10444361B2 (en) | Laser tracker having two measurement functionalities | |
US8077294B1 (en) | Optical autocovariance lidar | |
CN111272681A (en) | Light splitting device | |
CA2476174A1 (en) | Low-coherence interferometric apparatus for light-optical scanning of an object | |
US8203715B2 (en) | Knowledge based spectrometer | |
US7808647B2 (en) | Shape measuring method | |
CN109690234A (en) | System and method for optimizing focusing of imaging-based coverage metrics | |
GB2416835A (en) | Studying the relative movement of a surface using an interferometer | |
US7189984B2 (en) | Object data input apparatus and object reconstruction apparatus | |
WO2018213212A1 (en) | Standoff trace chemical detection with active infrared spectroscopy | |
US9826918B2 (en) | Method and device for detecting the surface structure and properties of a probe | |
US11041754B2 (en) | Standoff trace chemical detection with active infrared spectroscopy | |
Mierczyk et al. | Multispectral Laser Head for Terrain Identification and Analysis | |
JP4672496B2 (en) | Concrete degradation factor detection method | |
JP2007085850A (en) | Concrete degradation factor detection method and detection apparatus | |
US12099009B2 (en) | Method and apparatus for surface plasmon resonance imaging | |
Capeleto et al. | An integrated system for measurement of 3-D shape and color texture of artistic and architectural cultural assets | |
US20040135995A1 (en) | Spectroscopic ellipsometer wafer mapper for DUV to IR | |
JP6973206B2 (en) | Displacement measuring device and displacement measuring method | |
JP3309537B2 (en) | Fourier transform spectrophotometer | |
JP2021071302A (en) | Object inspection device and object inspection method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: LEICA GEOSYSTEMS AG, SWITZERLAND Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BRAUNECKER, BERNHARD;STEGMAIER, PETER;KIPFER, PETER;SIGNING DATES FROM 20061113 TO 20061124;REEL/FRAME:018880/0199 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
CC | Certificate of correction | ||
FPAY | Fee payment |
Year of fee payment: 4 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 8 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 12TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1553); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 12 |